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NanoWatt低压等离子涂层系统 LFL-CoatML

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010-58237766

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产品详情

Low-pressure Plasma Coating System 低压等离子涂层系统

NW-CoatML

General

整体介绍

The NW-CoatML system is a medium-sized low-pressure plasma system capable of plasma

coating components using liquid precursors. The components to be treated are put in trays, which are inserted into the vacuum chamber.

NW-CoatML是一种中使用液态单体的低压的等离子处理系统。处理产品时首先将产品放在托盘上，之后把托盘放入真空腔体进行处理。

The equipment operates in batches.

该设备是凭据批次处理产品的。

The system is completely comprised in a welded and powder coated rigid steel frame. The frame is closed at the bottom (with a cut-out for the vacuum pump) as well as at the sides and is open at the top. Pump as well as fully enclosed electrical cabinet are comprised within the

frame.

该系统使用全包的焊接框架结构�？蚣艿牡撞坑校ㄓ糜谧爸谜婵毡玫那锌冢�，其侧面是关闭的，顶部是开放的。真空泵以及电控柜完全包括在内部。

Applications

应用

Low-pressure plasma system NW-****M* (for reference only)

低压等离子系统NW-****M*（图片仅供参考）

Vacuum chamber

真空腔室

The process chamber is made of special grade aluminum with wall thickness of 30mm. All

welds are done in several passes at the interior and exterior of the chamber, which assures a long-lasting vacuum tightness for the full lifespan of the machine, which can easily be over 20 years.

真空腔体由壁厚30mm特级铝制成。全部焊接在腔室的内部和外部分多次完成，这确保了机械的整个使用寿命（很容易凌驾 20 年），以及长期真空密封性。

The vacuum chamber has approximated inner dimensions of w900*d800*h1000 mm, bringing the internal volume to approximate 0,72m³ or 720 litre.

真空腔体的内部尺寸约为长900*宽800*高1000 毫米，内部容积约为 0.72 立方米或 720 升。

The vacuum chamber contains the material to be treated (components) as well as the complete electrode setup needed to treat the material.

真空腔体内包括要处理的质料（组件）以及处理质料所需的完整电极结构。

The chamber has heated walls and is fully thermally insulated.

腔体壁具有加热功效并且完全隔热。

The chamber is closed with a swivelling door, which is operated manually and equipped with closing handles. The door O-ring is fixed using a proprietary design, allowing an easy & hassle- free exchange. The door is heated and fully thermally insulated.

腔体门配有把手，手动进行旋转开关。腔门密封圈使用专门的设计牢固，同时，也可以轻松更换。墙门也是可以加热并且完全隔热的。

Vacuum pump

真空泵

The vacuum pump group consists of 2 pumps, both dry pumps. This type of pumps has aproven track record in the semiconductor processing industry. This water-cooled pump-combo delivers a pumping speed of 480m³/h.

真空泵由泵组组成，包括两个泵，均为干泵。这种泵在半导体加工领域有着很好的应用。该泵组使用水冷，可达480m³/h的抽速。

Vacuum

valves/connection

真空阀门/连接

The chamber can be isolated from the pump through a heated and thermally insulated ISO100

angle valve.

腔体和真空泵之间通过一个可以加热且良好隔热的ISO100真空角阀。

All connections between pump, valves and chamber are made of stainless-steel grade 304, are electrically heated and thermally insulated. The pump connection is specifically designed to ensure homogeneous flow characteristics during the coating process.

泵、阀门和腔室之间的所有连接均由 304 级不锈钢制成，管路加热使用电加热，同时做好了绝热。专门设计的泵连接确保涂层历程中的均匀流动特性,从而包管产品处理的均匀性。

Pressure gauges

真空计

The system holds 3 independent pressure gauges:

系统包括3个独立的真空计

One atmosphere indicator 一个常压传感器

One Pirani gauge to control the pump cycle 一个皮拉尼真空计控制抽真空历程丈量

One heated capacitance gauge to control process pressure The pressure gauges have protecting KF16 isolation valves. 一个薄膜规控制制成真空度。所有的真空计使用KF16隔离阀门�；�。

Venting

排气

The system comes with a KF25 venting valve, equipped with a silencer/flow limiter

该系统配备一个 KF25 排气阀，配备消音器/流量限制器。

Gas delivery

气体输送

The system is equipped with 2 gas mass flow controller and 1 chamber purge line. Each line is equipped with an additional shut-off valve. The gas is delivered to every slot in the machine by means of a gas manifold.

该系统配备2个质量流量控制器和1个腔体吹扫管路。每一条气体输送管路都配有一个截止阀。气体通过气路输送至腔体。

Liquid delivery

液体输送

The system has standardly 1 LDM (Liquid Delivery Module) included. The LDM has all controls on board by its own internal PLC, which is connected to the main PLC of the system. It can easily be replaced by a spare LDM (plug-and-play).

该系统标准包括 1 个 LDM（液体输送�？椋�。 LDM 的所有控制都由其自己的内部 PLC 控制，该 PLC 连接到系统的主 PLC。它可以很容易地被备用 LDM替换（即插即用）。

The LDM allows to bring the process liquid into the right condition before supplying it as a vapor to the coating process. The LDM is connected to the process chamber by a heated and thermally insulated process line. The vapor flow gets further distributed into every process slot, by means of a proprietary heated and thermally insulated manifold.

液体输送�？槭沟ヌ逶诮肭惶褰泄ひ沾碇巴耆�。LDM通过加热管路与腔体进行连接。通过合适的加热和热绝缘管路，可以很好的将单体气化，并进一步输送到真空腔室。

Plasma electrodes

等离子电极

The plasma electrode module is an assembly of RF-powered and ground electrodes. It offers standardly 6 slots to place a tray holding the components to be treated. In case of larger/higher components, the slots can be defined larger, which will result in lesser slots.

等离子点击�？榘ㄉ淦倒┑缂敖拥氐牡缂榧�。包括6个标准插槽，安排处理样品的托盘。关于更大的产品，可以定制更大的插槽，这就会导致插槽数量的减少。

Due to the modular setup, the machine can easily be changed over to a different geometry by switching the full plasma electrode module.

通过�？榛牡缂杓�，设备可以进行整个�？榛缂母�。

The RF-powered electrodes are temperature controlled by a recirculating heat exchanger.

射频电极由循环热交换器控制温度。

Plasma generator

等离子爆发器

The system is equipped with a 2kW 13,56MHZ RF generator. The RF power is transferred by an automatic matching network to the RF-electrodes.

该系统配备了一个 2kW 13.56MHZ 射频爆发器。射频功率通过自动匹配网络传输到射频电极,进行自动功率匹配。

Component loading

产品上料

Parts to be treated are positioned in a tray. These trays are equipped with wheels. The trays are inserted in between the electrodes, using a rail system inside the chamber. The rail system is integrated in the plasma electrode module.

需要处理的产品安排在托盘中。托盘是配有轮子的。使用腔室内的导轨系统将托盘插入电极之间。导轨系统集成在等离子电极�？橹�。

Useable size of the trays (inner dimension) is approximately 700*600mm. The system can hold up to 6 trays. Maximum height for components in the standard setup is 40mm.

托盘的可用尺寸（内部尺寸）约为 700*600mm。该系统最多可容纳 6 个托盘。标准设置中可处理的最大高度为 40 毫米。

System controls

控制系统

The system is fully controlled by a PLC. Automatic processing and alarming functions are fully mastered by the PLC, independent of the HMI Operator interaction happens through the HMI.

该系统完全由PLC控制。自动处理和报警功效完全由 PLC 掌握。操作人员通过人机界面进行设备的操作。

The HMI is a 17” industrial touch screen PC and offers a very comprehensive and intuitive interface with the user. Depending on the allocated user-level, it allows to run the machine in manual or automatic mode, program process recipes or alter system settings. The HMI is also taking care of the optional historical data logging with exporting functions and standardly allows for remote access support over the internet.

HMI 是一个 17 英寸的工业触摸屏 PC，为用户提供了一个很是全面和直观的界面。用户进入差别的级别，可以在手动或自动模式下运行机械、修稿配方或更改系统设置。 HMI 还通过导出功效导出历史数据纪录，并允许通过 Internet 进行远程会见支持。

Status feedback is also provided through a 5-fold LED signal lamp and buzzer

设备运行状态可以通过LED灯和蜂鸣器进行快速掌握。

Certification

认证

The equipment is CE certified

设备通过CE认证

Warranty

质保

The warranty period is 12 months

保修期为12个月

Options

选件

Several options available: extra gas lines, extra sets of trays, frame top cover, manual loading

trolley, ERP/MES integration, automatic loading

提供多种选择：特另外气体管路、特另外托盘组、框架顶盖、手动装载手推车, ERP/MES 集成, 自动装载装置

Characteristics 设备参数：

Electrical

电力供应

3*400V+N+PE at 60A

Compressed air

压缩空气

6-8 bar

Clean and dried air according class4 specification of ISO standard 8573.1

凭据ISO 8573.1标准

Cooling water

冷却水

20°C

20 liter/minute at 2 bar 2bar压力情况下20升/分钟

Clear & soft water, free of particles 洁净水，没有粒子

Cooling power 6kW 冷却功率6kW

Process gas

工艺气体

Purity>99,95% 纯度＞99.95%

Pressure : 1-2 bar 压力1-2bar

Exhaust

尾气排放

Direct tube to the outside through KF40 flange or hose inner diameter 38mm

通过KF40法兰或内径38mm软管连接

Connectivity

网络连接

(Proxy-free) internet line 互联网

Dimensions

设备尺寸

2200*16000*1920 (+250 signal light) mm (l*w*h)

Weight

设备重量

2000 kg

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接待来电咨询

邮箱：sales@beijingec.com

电话：010-58237766 地点：北京市向阳区酒仙桥东路9号A2-西七层

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NanoWatt低压等离子涂层系统 LFL-CoatML

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